MEMS
MEMS is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size, and MEMS devices generally range in size from 20 micrometres to a millimetre,... Wikipedia
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Acronym for "Micro Electronic Mechanical Systems," or microelectromechanical systems: Systems that combine mechanical and electrical components and are ...