Dichlorosilane
Chemical compound
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Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H₂SiCl₂. In its major use, it is mixed with ammonia in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS·NH₃,... Wikipedia
Molar mass: 101.01 g/mol
Boiling point: 46.94°F (8.3°C)
Density: 4.228 g cm−3
Chemical formula: SiH; 2Cl; 2
Vapor pressure: 167.2 kPa (at 20 °C)
Melting point: −122 °C (−188 °F; 151 K)
NFPA 704 (fire diamond): 4 4 2W